Device Label: Active and Service
Location: 5-055A Katz Group Centre
Availability Calendar:
Description:
The Resonetics RapidX 250 Series is an excimer laser-based laser micromachining system designed to fabricate micro-machined components as small as 5 micron feature size. The system can laser machine polymers, glass, sapphire, ruby, silicon, ceramics and metals among others.
The RapidX 250 incorporates an excimer laser with 30 Watts of average power at 248nm laser wavelength and 12 Watts at 193nm.The laser repetition rates range from 0 to 100 Hz. The RapidX250 Series is available in two (2) laser wavelengths, 248nm and 193nm. The user has the option to select both laser wavelengths with quick change between wavelengths, offering the greatest flexibility in terms of material choice and applications.
The RapidX 250 series was designed for 2-D and 3-D laser micromachining. The system is comprised of 200mm x 200mm XY stages with Z axis, rotary and goniometer (45-degree tilt), permitting the most complex geometries to be machined, the system includes a user-friendly CAD conversion software package to allow the CAD drawing to be converted directly to machine code. The system has a camera vision system for part alignment and process viewing.
COMPexPro 110 Laser Subsystem Specifications:
ArF Laser:
· Wavelength: 193 nm
· Max output power: 12 W
· Max pulse energy at 100 Hz: 120 mJ
· Typical operating pulse energy: 96 mJ
· Repetition rate: 100 Hz
· Pulse duration: 20 ns
· Beam dimensions (v x H), FWHM: 24 mm x 5 mm
· Typical useable beam: 16.0mm x 3.4 mm
KrF Laser:
· Wavelength: 248 nm
· Max output power: 30 W
· Max pulse energy at 100 Hz: 300 mJ
· Typical operating pulse energy: 240 mJ
· Repetition rate: 100 Hz
· Pulse duration: 20 ns
· Beam dimensions (v x H), FWHM: 24 mm x 7 mm
· Typical useable beam: 16.0mm x 4.7 mm
LMACS Link: Go-to LMACS
Hourly fees for use:
SMART Network: $20
Academic: $40
Industry: $165
Resources:
Technical Reference Manual
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Laser Specs