KLA Zeta-20 Optical Profiler
Device use type: Self Serve / Fee for Service
Location: 5-055 Katz Group Centre
Description: The Zeta-20 benchtop optical profiler is a non-contact, 3D microscope and surface topography measurement system. The system is powered by patented ZDot technology and Multi-Mode optics, enabling measurement of a variety of samples: transparent and opaque, low to high reflectance, smooth to rough texture, and step heights from nanometers to millimeters.
Manufacturer Link: Zeta-20 Optical Profilometer | 3D Optical Microscope | KLA (kla-tencor.com)
User Manual:
Features:
Optics with 0.5x coupler: 5x,10x,20x,50x,100x
XY Movement: 220 x 220mm
5.0MP Camera
LMACS Link: Go-to LMACS
Hourly fees for use:
SMART Network: $20
Academic: $40
Industry: $80