KLA Zeta-20 Optical Profiler

Device use type: Self Serve / Fee for Service

Location: 5-055 Katz Group Centre

Description: The Zeta-20 benchtop optical profiler is a non-contact, 3D microscope and surface topography measurement system. The system is powered by patented ZDot technology and Multi-Mode optics, enabling measurement of a variety of samples: transparent and opaque, low to high reflectance, smooth to rough texture, and step heights from nanometers to millimeters.

Manufacturer Link: Zeta-20 Optical Profilometer | 3D Optical Microscope | KLA (kla-tencor.com)

User Manual:

Features:

Optics with 0.5x coupler: 5x,10x,20x,50x,100x

XY Movement: 220 x 220mm

5.0MP Camera

LMACS Link: Go-to LMACS

Hourly fees for use:

SMART Network: $20

Academic: $40

Industry: $80

Equipment and Devices

KLA Zeta-20 Optical Profiler

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