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Resonetics Rapid X 250 Workstation

Open

COMPex Pro Laser for the Workstation

Section 1 : Emergency Shutdown Procedures

The laser source for the Rapid X 250 is the Coherent COMPex Pro

To shutdown the laser Switch off the red Main Power Switch located at the end of the laser enclosure

Section 2: What to do in case of an accident?

• Alert other people in the area so that they can assist

• Turn off MAINS POWER the laser immediately

• If emergency medical assistance is required call 911

• If the injured person requires medical attention assist them to get it

• Notify Laser Safety Officer (LSO)

• Finally, report the incident to Health, Safety and Environment

Section 3: Equipment / Safety Contacts

Laser Safety Officer: Michel Gautier | mgauthie@ualberta.ca | 587-920-8236

Secondary Contact: Don Wilson | don4@ualberta.ca | 780-203-8991

Section 4: Introduction to Equipment

The Resonetics Rapid X 250 Laser Micromachining Workstation is used to machining a wide variety of materials including plastics, metals, glass, ceramics.

A Coherent COMPex Pro exciplex laser generates extreme ultraviolet pulses by producing either Krypton Fluoride (248 nm) or Argon Fluoride (193 nm).  These highly unstable short lived complexes emit laser light when they break apart.

The 20 ns laser pulses can be produced at repetition rates from 1Hz to 100Hz.

The upper screen shows an image from the off-center camera.

The lower screen is the computer monitor.

Computer controlled motion stages allow for:

• X direction - 200 mm travel

• Y direction - 200 mm travel

• Z direction - 23 mm travel 

• Rotation around Z axis - +180 → -70 degrees

• Goniometer perpendicular to Z axis +/-45 degrees

A detailed users manual can be found in the Resources section at the bottom of the Rapid X 250 page.

Section 5: Before using the equipment

Section 5: Turning on and using the equipment

A. Room Ventilation Switch

B. Lytron Water Chiller

C. WorkStation Power

D. Chiller Condenser Water Valves

E. Compex Laser Power Switches

F. Compressed Gas Supply Valves

G. WS-Turret Power Switches

H. Laser Welder Controls

I. Cylinders for Nitrogen purge and Argon process gases

It is recommended to switch the different elements in the following sequence:

5.1 Switch room ventilation switch to the occupied position

Location A from room layout

5.2 Open valves for cooling water  (red valve lever in line with the hoses)

Location D from Room Layout

Turn on RETURN first then turn on SUPPLY

5.3 Turn on the Lytron water chiller (5 to 20 C) 

Location B from room layout

5.4 Turn on the Rapid X 250 power Switch

Location C from room layout. Power switch located at bottom left of the Workstation.

5.5 Turn MAINS switch (Red) to ON position then turn Key Switch to 'I' position

Location E from room layout

5.6 Open Compressed Lab Air Valve (Red lever towards filter)

Location F from room layout

5.7 Turn on the Illumination Source

5.8 Warm up/ test fire the laser to determine beam energy

Ensure that the BEAM STOP and the INTERLOCK BYPASS are both “OFF” as shown below:

Using the laser control pad:

1. Set the [REPRATE] to 10Hz

2. Set [MODE] to high voltage (HV)

3. Set excitation voltage [HV] to 22kV

4. Ensure that the beam stop is closed

5. Set trigger mode [TRIGGER INT/EXT] to internal (INT)

6. Start laser pulses by pressing the [RUN/STOP] button

7. Allow laser to operate for 10 minutes

8. Record the pulse energy (mJ) and chamber pressure (mbar)

9. Stop the laser by pressing the [RUN/STOP] button again

Section 6: Standard shutdown routine

To turn off the system the following steps should be followed:

6.1 Stop laser if running by pressing the RUN/STOP Key

6.2 Turn the Key Switch to '0' and the MAINs Switch to OFF

Location E from room layout

6.3 Shut down the computer using Windows

Wait for windows to power down the computer

6.4 Turn off Microscope Light Source

6.5 Turn off the Rapid X 250 power switch

Location C from room layout. Power switch is located and bottom left of the workstation

6.6 Turn off the Lytron water chiller 

Location B from room layout

6.7 Close valves for cooling water  (red valve levers at right angles to hoses)

Location D from Room Layout

Turn off SUPPLY first then turn off RETURN

6.8 Close Compressed Lab Air Valve (Red lever parallel with wall as shown below)

Location F from room layout

Section 7: Special procedures

7.1 Starting the Computer Interface

Turning on the power to the Workstation automatically starts the computer

Log into the system with the password that you have been provided with.

If you do not receive a password, please contact Device Development personnel.

The first screen you see is the Windows Welcome Screen

Double-click on the icon for A3200 Motion Composer

After the motion stages have completed their initialization, it is safe to open the access door.

7.2 Loading and unloading samples in Rapid X 250 Workstation

The front access door of the Workstation is Interlocked to the Beam Stop.

1. Open the Access Door

2. Place the sample to be machined on the vacuum chuck or on a custom jig attached to the chuck.

3. Close the Access Door to re-enable the BEAM STOP interlock